Cleaning apparatus

Cleaning and liquid contact with solids – Processes – Including regeneration – purification – recovery or separation...

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Details

134 21, 134 254, 134107, 134108, 134200, B08B 310

Patent

active

056075146

ABSTRACT:
The cleaning apparatus of the present invention is composed of a cleaning chamber 1 of vacuum-tight structure in which a work W to be cleaned is contained, an organic solvent vapor generating tank 4 communicated with the cleaning chamber 1 via piping, and a vacuum pump 6 for evacuating the cleaning chamber 1. A heat exchange member 3 through which a cooling medium passes is provided upside in the cleaning chamber 1. After the cleaning chamber 1 is reduced in pressure, the cooling medium is supplied into the heat exchange member 3 while organic solvent vapor is introduced from the vapor generating tank 4 into the cleaning chamber 1. Thus, a cleaning process is executed in combination of vapor cleaning by the vapor condensing on the surface of a work W and shower cleaning by the vapor being liquefied by the heat exchange member 3 and dropping onto the work W.

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WPI Accession No. 91-203584/28 & JP 3127676A (Yamazaki) Abstracts.

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