Cleaning and liquid contact with solids – Apparatus – With work feeding and/or discharging means
Patent
1992-05-08
1993-11-30
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With work feeding and/or discharging means
134140, 134153, 134157, 134181, 134902, B08B 1102
Patent
active
052656322
ABSTRACT:
A cleaning apparatus includes a cleaning unit provided with cleaning tubs in which cleaning liquid is contained, and a carrying mechanism for carrying matters to be processed into and out of the cleaning unit. The carrying mechanism has holding members for holding the matters thereon. The cleaning apparatus further includes a chamber in which the carrying mechanism is housed, and a cleaning/drying system arranged in an upper portion of the chamber to clean and dry the matters-holding members of the carrying mechanism. The cleaning/drying system has cleaning and drying nozzles through which cleaning liquid and drying air are jetted against the matters-holding members of the carrying mechanism.
REFERENCES:
patent: 4694527 (1987-09-01), Yoshizawa
patent: 4745422 (1988-05-01), Matsuoka et al.
patent: 4838979 (1989-06-01), Nishida et al.
patent: 5158100 (1992-10-01), Tanaka et al.
Stinson Frankie L.
Tokyo Electron Limited
Tokyo Electron Saga Limited
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