Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent
1987-04-29
1989-02-14
Hornsby, Harvey C.
Cleaning and liquid contact with solids
Apparatus
With movable means to cause fluid motion
134201, 310334, B08B 310
Patent
active
048040070
ABSTRACT:
A transducer array for use in a megasonic cleaning system comprising a flat plate made of quartz or sapphire or boron nitride and a transducer having a conductive flat surface bonded to the flat plate and a conductive surface spaced from the flat plate.
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Hornsby Harvey C.
Stinson Frankie L.
Verteq, Inc.
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