Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Patent
1993-08-25
1994-05-17
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With plural means for supplying or applying different fluids...
1341041, 134902, B08B 302
Patent
active
053118936
ABSTRACT:
A cleaning apparatus includes a cleaning unit provided with cleaning tubs in which cleaning liquid is contained, and a carrying mechanism for carrying matters to be processed into and out of the cleaning unit. The carrying mechanism has holding members for holding the matters thereon. The cleaning apparatus further includes a chamber in which the carrying mechanism is housed, and a cleaning/drying system arranged in an upper portion of the chamber to clean and dry the matters-holding members of the carrying mechanism. The cleaning/drying system has cleaning and drying nozzles through which cleaning liquid and drying air are jetted against the matters-holding members of the carrying mechanism.
REFERENCES:
patent: 4715392 (1987-12-01), Abe et al.
patent: 4924892 (1990-05-01), Kiba et al.
patent: 4936328 (1990-06-01), Yatabe
patent: 5127363 (1992-07-01), Nakamura et al.
Stinson Frankie L.
Tokyo Electron Limited
Tokyo Electron Saga Limited
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