Cleaning apparatus

Details Cleaning apparatus Cleaning apparatus

1993-12-03

1996-04-30

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

Having self cleaning means

134112, 134 953, 134155, 134902, B08B 302

Patent

active

055115691

ABSTRACT:
An improved cleaning apparatus preventing new cleaning chemicals form contamination at the time of exchanging used cleaning chemicals with the new chemicals is provided. The apparatus includes a cleaning chemicals tank storing new chemicals and a cleaning vessel. A first cleaning chemicals supply conduit supplying new chemicals from tank into vessel is coupled to cleaning chemicals tank. A waste fluid conduit externally discharging used cleaning chemicals is provided at the bottom of vessel. Vessel is provided with wetting agent supply means supplying a wetting agent to wet the inner wall surface 8a of vessel.

REFERENCES:
patent: 5027841 (1991-07-01), Breunsbach et al.
patent: 5100544 (1992-03-01), Izutani et al.
patent: 5141009 (1992-08-01), Morantz
patent: 5180431 (1993-01-01), Sugimoto
patent: 5232476 (1993-08-01), Grant
patent: 5279926 (1994-01-01), Chandler et al.
patent: 5368651 (1994-11-01), Esser
"The Measurement of Particles in Circulating Filter System", Mili-Pore News No. 01, 1989.6.
"Cleaning and Wet Etching", Semiconductor World 1986.9.
Rompps Chemisches Worterbuch, Franckh'sche Verlagshandlung, W. Keller & Co., Stuttgart, 1969, p. 582.

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