Metal treatment – Compositions – Fluxing
Patent
1991-04-01
1992-03-10
Rosenberg, Peter D.
Metal treatment
Compositions
Fluxing
148 24, 148 25, 568303, B23K 3534
Patent
active
050947010
ABSTRACT:
This invention is a residue-free cleaning process for removing metal-containing contaminants from a surface of a substrate of the type used in manufacturing semi-conductor devices. The process comprises contacting the substrate with an effective amount of a cleaning agent comprising a .beta.-diketone or .beta.-ketoimine dispersed in an atmosphere capable of oxidizing the metal-contaminants at a temperature sufficient to form volatile metal-ligand complexes on the surface of the substrate. The volatile metal-ligand complexes are sublimed from the surface of the substrate leaving essentially no residue.
REFERENCES:
patent: 2801196 (1957-06-01), Doerr
patent: 3301688 (1967-01-01), Simpelaar
patent: 4059218 (1977-11-01), Choby, Jr.
patent: 4060191 (1977-11-01), Choby, Jr.
Bohling David A.
Ivankovits John C.
Norman John A. T.
Roberts David A.
Air Products and Chemicals Inc.
Gourley Keith D.
Marsh William F.
Rosenberg Peter D.
Simmons James C.
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