Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate
2005-04-05
2005-04-05
Kornakov, M. (Department: 1746)
Cleaning and liquid contact with solids
Processes
With treating fluid motion
C134S002000, C134S010000, C510S175000, C510S176000, C510S178000, C510S201000, C510S467000
Reexamination Certificate
active
06875288
ABSTRACT:
The cleaning agent described above comprises a surfactant and an organic solvent, and the cleaning method described above is characterized by allowing the cleaning agent described above to flow on the surface of the material to be treated at a high speed to thereby clean the above surface. According to the present invention, deposits adhering firmly to a surface of a material to be treated can readily be removed without damaging the material to be treated.
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Abe Kojiro
Aoyama Tetsuo
Goto Takuya
Gotoh Hideto
Ishihara Fukusaburo
Antonelli Terry Stout & Kraus LLP
Kornakov M.
Mitsubishi Gas Chemical Company Inc.
Tokyo Electron Limited
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