Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Patent
1997-06-04
2000-11-07
Gupta, Yogendra
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
510477, 510499, C11D 904, C11D 1500
Patent
active
061437050
ABSTRACT:
Removing particles and metallic contaminants without corrosing the metallized wirings and without giving adverse effect of planarization on the semiconductor substrate surface can be effectively achieved by use of a cleaning agent which comprises an organic acid having at least one carboxyl group and a complexing agent having chelating ability.
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Hayashida Ichiro
Ichikawa Osamu
Kakizawa Masahiko
Gupta Yogendra
Wako Pure Chemical Industries Ltd.
Webb Gregory E.
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