Cleaner for inspecting projections, and inspection apparatus and

Details Cleaner for inspecting projections, and inspection apparatus and Cleaner for inspecting projections, and inspection apparatus and

1998-04-06

2000-10-10

Niebling, John F.

Semiconductor device manufacturing: process

With measuring or testing

134 6, 451533, 324754, G01R 3126

Patent

active

061301043

ABSTRACT:
A cleaner of this invention is a cleaner for inspecting projections and removes any substance, e.g., aluminum oxide, which attaches to needle points of probe needles, when the probe needles pierce into the cleaner. The cleaner has a cleaner layer and a substrate. The cleaner layer is constituted by an elastic material layer, and a filler having a surface state improving function of the inspecting projections and dispersed in the elastic material layer. As the filler having a surface state improving function, a powder including at least one of ceramic materials, e.g., sand, glass, alumina, Carborundum (trade name), and the like, or a fiber layer made of an inorganic fiber or organic fiber can be employed.

REFERENCES:
patent: 5174765 (1992-12-01), Williams et al.
patent: 5220279 (1993-06-01), Nagasawa
patent: 5778485 (1998-07-01), Sano et al.
patent: 5968282 (1999-10-01), Yamasaka
patent: 6056627 (2000-05-01), Mizuta

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