Clean transfer method and system therefor

Details Clean transfer method and system therefor Clean transfer method and system therefor

1991-02-28

1992-08-18

Joyce, Harold

Ventilation

Clean room

118719, 20429825, 414217, 414786, B65G 6500

Patent

active

051394596

ABSTRACT:
A clean transfer method capable of safely transferring a semiconductor or the like to various apparatus for treating the semiconductor while keeping the environment clean. In the method, the semiconductor is transferred between a vacuum clean box arranged in a clean room and kept at the degree of vacuum of 1 Torr or less and a vacuum chamber arranged in a maintenance room while transfer ports of the vacuum clean box and vacuum chamber are kept air-tightly connected to each other. The vacuum clean box is movably arranged.

REFERENCES:
patent: 4674939 (1987-06-01), Manley et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4732527 (1988-03-01), Conche
patent: 4897963 (1990-02-01), Reboul et al.
patent: 4948979 (1990-08-01), Munakata et al.

Affiliated with

Also associated with

Rating

Clean transfer method and system therefor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Clean transfer method and system therefor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Clean transfer method and system therefor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1244866