Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rotating or circulating rack
Reexamination Certificate
2007-07-31
2010-06-08
Rodríguez, Saúl J (Department: 3652)
Material or article handling
Movable rack having superposed, charge-supporting elements,...
Rotating or circulating rack
C414S416080, C414S940000
Reexamination Certificate
active
07731470
ABSTRACT:
A reticle rotatable rack is provided at an upper position, and a pod rotatable rack is provided at a lower position in a clean stocker. A clean gas is supplied downwardly. In the stocker, a pod transportation device and a reticle transportation device are elevated and lowered. Load ports, a pod opener, and the pod rotatable rack are connected by the pod transportation device. The pod opener and the reticle rotatable rack are connected by the reticle transportation device.
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Notification of Reasons for Refusal dated May 20, 2008, issued in corresponding Japanese Patent Application No. 2006-207400 and English translation.
Murata Kikai Kabushiki Kaisha
Rodríguez Saúl J
Snelting Jonathan D
Westerman Hattori Daniels & Adrian LLP
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