Clean room system

Details Clean room system Clean room system

2005-10-18

2005-10-18

Boles, Derek S. (Department: 3749)

Ventilation

Clean room

C414S935000

Reexamination Certificate

active

06955595

ABSTRACT:
A clean room system is provided. The clean room includes a plurality of multi-level clean rooms and an air passage. The plurality of multi-level clean rooms has at least a lower clean room and an upper clean room above the lower clean room. The air passage permits air flow between the upper clean room and the lower clean room and smooths the air flow.

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