1986-04-30
1987-09-15
Joyce, Harold
55385A, 98 346, F24I 3044
Patent
active
046931759
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
This invention relates to a multi-purpose flexible clean room system by which a clean room of a desired extent having clean zones of desired degrees of cleanliness can be constructed in an existing building at will with satisfactory work-ability within a short period of time.
The construction of industrial clean rooms and clean tunnels (both inclusive are generally called clean rooms in this specification) is required in industries of semiconductors, fine chemicals, precision machines, etc. However, in the space within the industrial clean room will usually exist working zones where a high degree of cleanliness is required and non-working zones where a high degree of cleanliness is not required, such as those for workers to move, for installation of attached facilities and other marginal spaces. These working and non-working zones differing from each other in the degree of cleanliness of air are formed according to the layout of operation for carrying out productive activities in the clean room by installing properly many air treating equipment for carrying out properly the supply and exhaust of clean air and controlling flows of air. However, vertical laminar flow system clean rooms and horizontal laminar flow system clean rooms produced the most numerously heretofore were sometimes difficult to satisfy versatilely the actual demands of builders.
For example, a production line which has heretofore required no clean room may require a clean room as high quality products are required, or a small-scaled clean room may be required near the existing production line so that the line is obliged to be remodelled for performing only important processes in the clean room. The subject of the highest priority in such a case would be that a clean room to achieve such an object should be constructed within a short period of time without stopping the present operation if possible and without changing substantially the layout of productive equipment and working method. In this construction it is frequently desired that the broadness of the clean room can be freely selected according to the object and the clean zone having a specially high degree of cleanliness can be provided only in a local portion of the space in the clean room. However, even if the prior well-known vertical laminar flow system clean room structure or horizontal laminar flow system clean room structure was intended to cope with such actual demands of builders, it could not satisfy these demands.
While there are various reasons for disabling said structure from coping with said demands, the fundamental one is that a plurality of members and equipment for forming the controlled flows of clean air are required to be installed on the floor of an existing building according to the design standards of the side of the clean room to be formed. The reason is that, for example, to control the air flow and separate the working zones from the non-working zones having different degrees of cleanliness, partition walls and posts are provided, wall members for surrounding and installing air treating equipment are required to be installed in a predetermined relation to each other, and a part or all of the instruments of the air treating equipment including fans, air inlet ports, air outlet ports, ducts, HEPA filters, heat exchangers, etc., are required structurally to be installed in a predetermined relation to each other between the ceiling and the floor. Further, an exhaust plenum and a supply air plenum are required to be newly prepared respectively beneath the floor or on the back of wall and on the back of ceiling or wall. Particularly in the vertical laminar flow system the ceiling surface and the floor surface provide respectively an air outlet port and an air inlet port and in the horizontal laminar system a certain wall surface provides an air outlet port and the wall surface opposed to said wall surface provides an air inlet port so that the ceiling surface and the floor surface or the wall surfaces themselves had to be constituted in a certa
REFERENCES:
patent: 3638404 (1972-02-01), Moll et al.
patent: 3880625 (1975-04-01), Shook
patent: 3949809 (1976-04-01), Gilles
patent: 4191543 (1980-03-01), Peters
patent: 4344784 (1982-08-01), Deckas et al.
Joyce Harold
Takasago Thermal Engineering Co., Ltd.
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