Clean room having an air conditioning system

Details Clean room having an air conditioning system Clean room having an air conditioning system

1997-04-07

1998-05-19

Graybill, David

Metal working

Barrier layer or semiconductor device making

454187, 553852, B01L 104, B01D 5000

Patent

active

057529850

ABSTRACT:
Apparatus comprising an outside-air conditioner 2, an operation zone 4, a ceiling filter 8 such as an HEPA or ULPA filter, a fan filter unit 9 comprising a chemical filter and a draft fan arranged only on an overhead carrying apparatus 5 and storing apparatus 6 arranged in the operation zone 4 in a clean room 1 chemical mist causing chemical contamination is removed to the carrying apparatus 5 and storing apparatus 6.

REFERENCES:
patent: 4694736 (1987-09-01), Yamagata et al.
patent: 5326316 (1994-07-01), Hashimoto et al.

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