Clean room facility and construction method

Details Clean room facility and construction method Clean room facility and construction method

2006-08-01

2006-08-01

Canfield, Robert (Department: 3635)

Ventilation

Clean room

C052S167100, C052S220800, C052S263000, C052S302100, C052S405100

Reexamination Certificate

active

07083515

ABSTRACT:
A vibration-inhibiting flooring structure for use in a facility housing vibration sensitive equipment includes a perforated bearing floor which includes a number of openings configured to inhibit the propagation of vibrations across the floor. Such a flooring structure may be used, for example, in connection with advanced clean-room facilities, where a facilities room and one or more plenums are provided in conjunction with the vibration-inhibiting floor.

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