Clean room ceiling structure

Details Clean room ceiling structure Clean room ceiling structure

1997-10-03

1999-11-30

Joyce, Harold

Ventilation

Clean room

55355, B01L 104

Patent

active

059933119

ABSTRACT:
A clean room ceiling structure includes a support structure and filter units with a filter frame and a filter secured in the filter frame. The filter frames are connected to the support structure. The filter units have sealing fluid grooves for sealing the filter units relative to the support structure.

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