Clean room atmosphere control

Details Clean room atmosphere control Clean room atmosphere control

1998-06-10

2000-05-02

Doerrler, William

Refrigeration

Storage of solidified or liquified gas

Liquified gas transferred as liquid

62 78, F17C 902, F24F 316

Patent

active

060558164

ABSTRACT:
A method and apparatus for providing a clean respirable atmosphere in a clean room. A liquefied breathable gas is supplied from a source thereof and filtered. The filtered liquid is vaporised and the gas produced by the vaporisation is filtered. Thereafter the filtered gas is introduced into the clean room.

REFERENCES:
patent: 2650481 (1953-09-01), Cooper
patent: 2873582 (1959-02-01), Green
patent: 2943459 (1960-07-01), Rind
patent: 4337071 (1982-06-01), Yang
patent: 5749232 (1998-05-01), Sauer
patent: 5775110 (1998-07-01), Waldron
patent: 5778687 (1998-07-01), Waldron
patent: 5913893 (1999-06-01), Gary et al.

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