Clean room air filtering system

Details Clean room air filtering system Clean room air filtering system

1998-11-02

2000-09-26

Joyce, Harold

Ventilation

Clean room

553852, 96108, 454228, F24F 316

Patent

active

061236179

ABSTRACT:
An air filtering system for a clean room has a make-up air handling unit that supplies filtered make-up air to a primary air handling unit. The make-up air that enters the make-up air handling unit is supplied from an outside source (such as the air outside of a building containing the clean room). Recirculation air from the clean room is also supplied to the primary air handling unit. A chemical filter filters both the make-up air and the recirculation air prior to the make-up air and the recirculation air entering the clean room. All recirculation air from the clean room and all make-up air passes through the chemical filter and the primary air handling unit prior to introduction to the clean room.

REFERENCES:
patent: 4549472 (1985-10-01), Endo et al.
patent: 5039321 (1991-08-01), Satoh et al.
patent: 5109916 (1992-05-01), Thompson
patent: 5314516 (1994-05-01), Kashima
patent: 5626820 (1997-05-01), Kinkead et al.
patent: 5752985 (1998-05-01), Nagafune et al.

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