Clean room

Details Clean room Clean room

2005-11-01

2005-11-01

Copenheaver, Blaine (Department: 1724)

Gas separation

Combined or convertible

In environmental air enclosure

C055SDIG001, C055SDIG007, C454S187000, C062S271000, C062S331000, C062S336000, C062S407000, C502S064000, C502S067000, C423S245100, C423S210000, C423S213200

Reexamination Certificate

active

06960236

ABSTRACT:
A clean room has a cleaned air feeding apparatus1having a rotor2adsorbing gaseous chemical substances to an adsorbing part16and desorbing the adsorbed gaseous chemical substances at the regenerating part17.Drive4drives the rotor2to the adsorbing part16and the regenerating part17.The gaseous chemical substances contained in the air are adsorbed, for removal, to the adsorbing part16,and cleaned air is fed into a clean room main body32.Heated regenerated air is fed to the regenerating part17so as to desorb the adsorbed gaseous chemical substances from the air.

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