Clean gas valve using a metal-to-metal seal

Details Clean gas valve using a metal-to-metal seal Clean gas valve using a metal-to-metal seal

1989-04-10

1990-03-27

Chambers, A. Michael

Valves and valve actuation

Hermetic flexible wall seal for actuator

Bellows

F16K 3100

Patent

active

049114115

ABSTRACT:
A sealed valve intended for use in ultrahigh purity applications uses a metal-to-metal seal in a crucial, but unacessible, portion of the valve. The metal-to-metal seal avoids the use of a weld which because of the location could not be adequately cleaned, and avoids the use of an O-ring seal. The O-ring seal typically would have a leak rate on the order of 10.sup.-7 standard cubic centimeters per second of helium, but the metal-to-metal seal provides a leakage rate of less than 10.sup.-13 sccm/s. In the preferred embodiment, the seal is formed by forcing a conical part into the opening of a bore. The force used is small emough to avoid permanent deformation of the sealing parts, and thus the seal can be opened and closed any number of times without degradation.

REFERENCES:
patent: 2391808 (1945-12-01), Vincent
patent: 4515344 (1985-05-01), Gemignani

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