Brushing – scrubbing – and general cleaning – Machines – With air blast or suction
Reexamination Certificate
2006-06-06
2006-06-06
Snider, Theresa T. (Department: 1744)
Brushing, scrubbing, and general cleaning
Machines
With air blast or suction
C015S301000, C156S916000, C156S345330
Reexamination Certificate
active
07055212
ABSTRACT:
An improvement to a Novellus HDP SPEED reactor chamber is described. An evacuation port of the Novellus SPEED Chamber is at one location in the chamber to remove injected cleaning gas from the chamber and there is a single input for cleaning gas connection into the chamber. In accordance an improvement a plurality of clean gas injectors is positioned on an adapter in the chamber and connected to the single input gas connection for distributing the cleaning gas in the chamber with the injectors spaced away from the evacuation port. The adapter is a U-shaped adapter and is positioned in the chamber with the adapter connected at the base to the single input gas connection. The adapter has two semicircular branch legs extending in opposite directions about the chamber to free ends that are connected to gas injectors. The free ends with the injectors are located in the chamber almost on the opposite end of the chamber from the evacuation port. Each of the two branch legs includes a second injector midway along the branch legs between the free ends and point of the branch to provide four injectors to evenly distribute the clean gas in the chamber.
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Blanco-Rivera Ignacio
Hartwig Sarah
Kruse Nathan J.
Brady III W. James
Snider Theresa T.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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