Organic compounds -- part of the class 532-570 series – Organic compounds – Heavy metal containing
Reexamination Certificate
2008-07-08
2008-07-08
Gonzale, Porfirio Nazario (Department: 1621)
Organic compounds -- part of the class 532-570 series
Organic compounds
Heavy metal containing
Reexamination Certificate
active
10643090
ABSTRACT:
The invention provides an organometallic complex, containing oxygen free organic ligands, for the deposition of a metal, preferably copper, silver or gold, and preferably by way of chemical vapor deposition. The organometallic complex having the formulain-line-formulae description="In-line Formulae" end="lead"?[(Do)nMLx]kin-line-formulae description="In-line Formulae" end="tail"?where M is a metal preferably selected from the group consisting of Cu, Ag and Au;Dois selected from the group comprising ethers, phosphines, olefins, sulfides, pyridines, carbonyl, hydroxyl, cyclopentadiene, benzene derivatives, allyls, alkyls, amines, polyamines, aniline derivatives, cyclooctadiene and combinations thereof;n is an integer having a value from 0 to 4;k is an integer having a value from 1 to 4;x is an integer having a value from 1 to 4; andL is an amidinate ligand of the formulain-line-formulae description="In-line Formulae" end="lead"?R1—NC(R2)N—R3in-line-formulae description="In-line Formulae" end="tail"?where R1, R2and R3are selected from the group consisting of alkyls, allyls, aryls, heteroaryls, hydrogen, non-metals and metalloids; and where R1, R2and R3are different or the same.
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Denk Michael K.
Fournier Sebastien
Gonzale Porfirio Nazario
Roylance Abrams Berdo & Goodman L.L.P.
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