Clamping frame for contact printers of working masks

Photocopying – Contact printing – Frames

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Details

355 91, 355 94, G03B 2728

Patent

active

048795739

ABSTRACT:
A clamping frame for contact printers of working masks in the semiconductor industry enables the application of packings made of easily obtainable raw materials and limits tangential forces acting on masks of the original and copy. A first packing and a second packing with a supporting frame between both packings is provided. The supporting frame prevents transmission of tangential forces to packings which come in contact with masks of the original and of the copy.

REFERENCES:
patent: 3604800 (1971-09-01), Jordan et al.
patent: 3751250 (1973-08-01), Moscony et al.
patent: 4007987 (1977-02-01), Sheets
patent: 4054383 (1977-10-01), Lin et al.

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