Clamping element with an integrated force sensor

Details Clamping element with an integrated force sensor Clamping element with an integrated force sensor

2006-02-07

2006-02-07

Noland, Thomas P. (Department: 2856)

Measuring and testing

Testing of apparatus

C073S862541, C024S489000

Reexamination Certificate

active

06993986

ABSTRACT:
A clamping element for the transport of a substrate in a predefined transport direction comprises a first and a second leg with a first and second clamping jaw for clamping a substrate. Each of the two clamping jaws has a clamping plate which is movable in transport direction relative to the corresponding leg. A sensor measures the deflection of the first clamping plate relative to the first leg. As soon as the measured deflection exceeds a predefined threshold value, the clamping element is opened.

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European Search Report, EP 02 07 7647 dated Jan. 7, 2003, 1 page.

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