Clamp for affixing a wafer in an etching chamber

Details Clamp for affixing a wafer in an etching chamber Clamp for affixing a wafer in an etching chamber

1998-08-25

2000-08-22

Bueker, Richard

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

C23F 102

Patent

active

061066648

ABSTRACT:
A clamp affixes a wafer by entirely covering the edge of the wafer, wherein the radius of the inner surface of the clamp is about 1 mm shorter than the radius of the wafer. Besides, there are four pairs of square protuberances distributed even along the inner surface of the clamp for affixing the wafer, wherein the square protuberances only hold the edge of the device regions of the wafer. Even though the wafer is slightly off position, the square protuberances are still able to affix the wafer properly. In addition, the lifetime of the clamp of the invention is about 100 hours, which is two times of a conventional clamp, so that the cost is reduced.

REFERENCES:
patent: 5326725 (1994-07-01), Sherstinsky et al.
patent: 5855687 (1999-01-01), Du Bois et al.
patent: 5868847 (1999-02-01), Chen et al.

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