Clamp assembly for a vaporization boat

Details Clamp assembly for a vaporization boat Clamp assembly for a vaporization boat

1993-09-10

1995-04-25

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Vaporizer

392390, 439804, C23C 1426

Patent

active

054106311

ABSTRACT:
A clamp assembly includes a clamp body of conductive material having a channel along one surface to receive the end of a vaporization boat. The channel has a depth which is greater than the thickness of the end of the vaporization boat such that a gap is formed between the end of the boat and the top of the channel. A metal member is fastened to the clamp body across the open top of the channel to form an enclosure for the end of the boat. Flexible graphite fills the gap and forms a compression fit upon fastening of the metal member to the clamp body.

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patent: 5107791 (1992-04-01), Hirokawa et al.
patent: 5182567 (1993-01-01), Wilder

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