Clad piezoelectric valve actuator and application of same in con

Details Clad piezoelectric valve actuator and application of same in con Clad piezoelectric valve actuator and application of same in con

1998-02-11

2000-08-01

Rivell, John

Fluid handling

Processes

Cleaning, repairing, or assembling

1374875, 25112905, 25112906, F16K 3102

Patent

active

060951753

ABSTRACT:
A micro-mass flow controller (10) has a sonic choked flow restriction (28) with an oscillatable valve (26) for repetitiously opening and closing the sonic choked flow restriction (28) in a time-modulated sequence to set or vary mass flow rate of gas through the sonic choked flow restriction (28) over a period of time to something between no flow and maximum mass flow rate. A bimorph piezoelectric actuator (40) is coated in a sputtered dielectric layer (78) and then encapsulated in stainless steel or other metal cladding (80). A closure member (46) on the actuator (40) is registered to a valve seat (70) by actuating the actuator (40) to force the closure member (46) in a puddle of adhesive (86) against the valve seat (70) until the adhesive (86) cures.

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