Circulation system of slurry

Details Circulation system of slurry Circulation system of slurry

1998-07-10

1999-11-30

Drodge, Joseph W.

Liquid purification or separation

With alarm, indicator, register, recorder, signal or...

Responsive to fluid flow

137565, 210137, 210167, 210196, 451 60, 451446, B01D 1712, B34B 100

Patent

active

059936479

ABSTRACT:
A slurry filtration system for supplying a slurry to a polisher to perform a chemical mechanical polishing process. The system comprises a first three-way valve, to receive the slurry supplied from an external system; a slurry pump, to control the slurry flowing from the first three-way valve, and to maintain a circulating state of the slurry within the circulating system after the chemical mechanical polishing process comes to a stop; a slurry filter, to filter a plurality of large size particles in the slurry pumped from the slurry pump; a second three-way valve, to supply the slurry flowing from the filter to the polisher; and a transportation pipe, connecting between the first and the second three-way valves to transport the slurry from the second three-way valve back to the first three-way valve when the polishing process has stopped.

REFERENCES:
patent: 4917123 (1990-04-01), McConnell et al.
patent: 5324425 (1994-06-01), Ellison
patent: 5664990 (1997-09-01), Adams et al.
patent: 5710069 (1998-01-01), Farkas et al.
patent: 5791970 (1998-08-01), Yueh
patent: 5895315 (1999-04-01), Pinder

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