Circulation system for high refractive index liquid in...

Details Circulation system for high refractive index liquid in... Circulation system for high refractive index liquid in...

2007-07-16

2010-11-02

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S027000, C355S053000, C396S611000, C438S908000

Reexamination Certificate

active

07826032

ABSTRACT:
A circulation system for a high refractive index liquid includes a first collecting section configured to collect a high refractive index liquid used in an immersion light exposure section; a first supply section configured to supply the high refractive index liquid collected in the first collecting section to a cleaning section as a cleaning liquid; a second collecting section configured to collect the high refractive index liquid used in the cleaning section; and a second supply section configured to supply the high refractive index liquid collected in the second collecting section to the immersion light exposure section, wherein the high refractive index liquid is circulated between the immersion light exposure section and the cleaning section.

REFERENCES:
patent: 2005/0208419 (2005-09-01), Inabe et al.
patent: 2006/0231206 (2006-10-01), Nagasaka et al.
patent: 2007/0182896 (2007-08-01), Adelman et al.
patent: 2008/0239260 (2008-10-01), Shiraishi
patent: 05267266 (1993-10-01), None
patent: 2006-80403 (2006-03-01), None
patent: WO 2005122218 (2005-12-01), None
“Development of new high refractive index liquid (Delphi) for next-generation immersion light exposure in semiconductor manufacturing,—realizing micro-fabrication of 32 nano-meter line width”, Mitsui Chemicals, Inc., Sep. 12, 2005, 4 pages <http://www.mitsui-chem.co.jp/whats/2005—0912.htm>.

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