Circulation housing for a mover

Details Circulation housing for a mover Circulation housing for a mover

2005-12-27

2005-12-27

Mullins, Burton (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Rotary

C310S012060, C310S052000, C310S058000, C310S064000

Reexamination Certificate

active

06979920

ABSTRACT:
A mover (36) for an exposure apparatus (10) includes a conductor array (358) and a circulation housing (362) that defines at least a portion of a fluid passageway (364) near the conductor array (358). The circulation housing (362) includes a wall (366A) having a wall thickness. In one embodiment, the wall thickness at a first position on the wall (366A) is different than the wall thickness at a second position on the wall (366A). The wall (366A) can be curved and the shape of the curve is different at the first position than at the second position. Further, a cross-sectional shape of the wall (366A) at the first position is different from a cross-sectional shape of the wall (366A) at the second position.

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Partial Translation WO2004/091079 pp. 4-8 and 12, Oct. 2004.
U.S. Appl. No. 09/139,954, filed Aug. 25, 1998, Teng et al.

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