Circular arc illumination apparatus

Details Circular arc illumination apparatus Circular arc illumination apparatus

1993-06-02

1995-05-16

Ben, Loha

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359212, 359221, 362298, 358474, 250236, G02B 2608

Patent

active

054166306

ABSTRACT:
A circular arc illumination apparatus includes a light source section for emitting rays, a condensing optical system for condensing the rays emitted by the light source section, a rotating mirror driven by a motor and reflecting the condensed rays from the condensing optical system, and a circular arc-shaped bending mirror for reflecting the rays reflected by the rotating mirror toward a mask so that the rays become incident on the mask. The apparatus effectively utilizes light emitted by the light source section, exposes an object uniformly, and is practical and economical for exposing a large substrate.

REFERENCES:
patent: 4458302 (1984-07-01), Shiba et al.
patent: 4572659 (1986-02-01), Omata
patent: 4759593 (1988-07-01), Kessler
patent: 4941719 (1990-07-01), Hisada et al.
patent: 4947030 (1990-08-01), Takahashi
patent: 5255114 (1993-10-01), Kessler

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