Fishing – trapping – and vermin destroying
Patent
1993-07-07
1994-11-29
Thomas, Tom
Fishing, trapping, and vermin destroying
257 50, 257530, 257355, 257546, 437922, H01L 2144, H01L 2148
Patent
active
053690540
ABSTRACT:
A static-charge protection device for an antifuse includes an additional second-sized aperture smaller in area than the antifuse apertures disposed in the same inter-electrode dielectric layer. Antifuse material is disposed in the second-sized aperture, and the upper electrode extends over the second aperture as well as the first aperture. A preferred process for fabricating the protection device utilizes the step of forming the smaller apertures and forming their antifuse material layers simultaneously with forming the antifuse apertures.
A static-charge protection device for an antifuse device includes an additional second-sized aperture larger in area than the first-sized antifuse apertures. Metal plug material is deposited and etched back. A layer of amorphous silicon antifuse material is formed and defined over the first and second sized apertures, the portion formed over the larger partially filled antifuse protection device cell being thinner.
REFERENCES:
patent: 5070384 (1991-12-01), McCollum et al.
patent: 5166556 (1992-11-01), Hsu et al.
patent: 5171715 (1992-12-01), Husher et al.
patent: 5233217 (1993-08-01), Dixit et al.
patent: 5290734 (1994-03-01), Boardman et al.
Chen Wenn-Jei
Chiang Steve S.
Forouhi Abdul R.
Yen Yeouchung
Actel Corporation
Gurley Lynne A.
Thomas Tom
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