Circuit units, substrates therefor and method of making

Details Circuit units, substrates therefor and method of making Circuit units, substrates therefor and method of making

1991-11-12

1994-01-04

Lateef, Marvin M.

Electrical resistors

With base extending along resistance element

Resistance element coated on base

338307, 338314, 338234, 338159, H01C 1012

Patent

active

052764230

ABSTRACT:
A layer of ceramic material such as alumina is plasma-deposited on a sheet member such as molybdenum or a composite laminate of molybdenum and graphite or other material of low thermal expansion to form a circuit unit substrate having a thick, adherent, electrically-insulating coating on a light, rigid and thermally-conducting base. Thick and thin film materials are deposited and fired on the insulating coating to provide conductors, insulators or resistors or the like in a circuit unit. The materials of the sheet member and of the insulating coating are selected to have matching thermal expansion coefficients so that the substrate remains flat and free of bowing during the firing of the thick and thin film materials. The plasma-deposited electrically-insulating layer is sealed to prevent moisture absorption during use.

REFERENCES:
patent: 3002044 (1961-09-01), Scoville
patent: 3791863 (1974-02-01), Quirk
patent: 4480013 (1984-10-01), Doi et al.
patent: 5119063 (1992-06-01), Nonnenmacher et al.
"Evaluation of Braze Processes for AlN Packages", R. Harshbarger, W. Jones, W. Jiang, and R. Zhuge, The International Journal for Hybrid Microelectronics, vol. 4, No. 1, Mar. 1991.
"Low Thermal Expansion Aluminum Alloy CMSH A-40 For Electronic Components", M. Hanada, Y. Itoh, Y. Takeda, K. Akechi, and M. Osada; Jan. 1990.

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