Circuit programming by use of an electrically conductive light s

Details Circuit programming by use of an electrically conductive light s Circuit programming by use of an electrically conductive light s

1982-09-27

1986-04-08

Larkins, William D.

Electric heating

Microwave heating

Tunnel furnace

357 51, 357 84, 219121LM, H01L 2348, H01L 2904

Patent

active

045816280

ABSTRACT:
The present invention consists in a semiconductor integrated circuit device characterized in that a circuit programming wiring layer is formed on an insulating film which is provided on a semiconductor substrate, and that a light shielding protective mask material is deposited around the circuit programming wiring layer except a program part thereof, through an insulating film.

REFERENCES:
patent: 3771026 (1973-11-01), Asai et al.
patent: 3792319 (1974-02-01), Tsang
patent: 4228451 (1980-10-01), Priel et al.
patent: 4261004 (1981-04-01), Masuhara et al.
patent: 4272775 (1981-06-01), Compton
patent: 4455495 (1984-06-01), Masuhara et al.

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