Circuit probing apparatus

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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Details

324 62, 324 64, 324 73PC, 324158F, G01R 3122

Patent

active

042675073

ABSTRACT:
Apparatus for probing electric circuits, such as thick layer circuits or printed circuits, comprising at least two probe tips, support arms respectively carrying the probe tips, respective program-controlled displacement units to displace the support arms so that the probe tips may assume any desired position in a plane parallel to that of the circuit to be tested, and means for displacing the support arms between a high position and a low position in which the probe tips are in contact with the circuit.

REFERENCES:
patent: 3437929 (1969-04-01), Glenn
patent: 3590372 (1971-06-01), DeSantis et al.
patent: 3702437 (1972-11-01), McGrath
patent: 4123706 (1978-10-01), Roch
Healy et al., Resistance Standard, IBM Technical Disclosure Bulletin, Jun. 1970, pp. 143,144.
Groenick et al., Integrated Circuit Full Wafer Diagnostic Using Special Test Stage For Scanning Electron Microscope, IBM Technical Disc. Bull., Jul. 1978, pp. 638,639.

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