Circuit pattern inspection instrument and pattern inspection...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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07088107

ABSTRACT:
Disclosed is a circuit pattern inspection apparatus for inspecting a conductive pattern of a circuit board which includes first and second comb-shaped conductive patterns (15a,15b) each having a plurality of terminal portions arranged substantially parallel to each other and a base portion connecting respective anchor ends of the terminal portions together, wherein the terminal portions of the first comb-shaped conductive pattern are alternately arranged with respect to the terminal portions of said second comb-shaped conductive pattern, and the first second comb-shaped conductive patterns (15a,15b) are adapted, respectively, to be supplied with an AC inspection signal, and grounded. The circuit pattern inspection apparatus having first and second detection means (20, 30) each having a detection electrode for detecting a signal from the first and second comb-shaped conductive patterns, and a scalar robot (80) operable to move each of the first and second detection means (20, 30) across common ones of the terminal portions, while allowing them be capacitively coupled with the terminal portions.

REFERENCES:
patent: 5266901 (1993-11-01), Woo
patent: 6943559 (2005-09-01), Yamaoka et al.
patent: 6995566 (2006-02-01), Yamaoka et al.
patent: 8-105926 (1996-04-01), None
patent: 2001-77163 (2001-03-01), None
patent: 2001-296326 (2001-10-01), None
patent: 2002-90407 (2002-03-01), None

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