Circuit-pattern inspecting apparatus and method

Details Circuit-pattern inspecting apparatus and method Circuit-pattern inspecting apparatus and method

2008-09-09

2008-09-09

Lauchman, L. G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237200, C356S237600, C250S306000, C250S310000

Reexamination Certificate

active

11698985

ABSTRACT:
A circuit pattern inspection apparatus and inspection method facilitate the creation of a recipe and the confirmation of a defect. The apparatus and method employ a dialogue-based operation for the creation of a recipe and the confirmation of a defect. Input items (such as contrast, calibration, etc.) for the recipe creation and their purposes are clarified. Input items (such as clustering, filtering, etc.) for the defect confirmation and their purposes are also clarified. The results obtained on the basis of these inputs are registered in the recipe.

REFERENCES:
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patent: 6421122 (2002-07-01), Nara et al.
patent: 2006/0133661 (2006-06-01), Takeda et al.
patent: 59-160948 (1984-09-01), None
patent: 5-258703 (1993-10-01), None
patent: 2006-170907 (2006-06-01), None

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