Circuit identifier for use with focused ion beam equipment

Details Circuit identifier for use with focused ion beam equipment Circuit identifier for use with focused ion beam equipment

1997-03-25

2000-12-05

Monin, Jr., Donald L.

Semiconductor device manufacturing: process

With measuring or testing

Optical characteristic sensed

438 7, 438401, 257797, H01L 2166

Patent

active

061565792

ABSTRACT:
A circuit die (10) has circuit modules (12a-12f). Adjacent the circuit modules (12a-12f) is a plurality of redundant circuits regions (14a-14i). Each of the redundant circuit regions (14a-14i) has one or more redundant circuits, such as redundant circuits (16k-16n). The redundant circuits (16k-16n) are identified and oriented via one of a binary, a ternary, or a quaternary circuit identifier comprised of symbols, such as symbols (18, 24, 44, and 56). The symbols (18, 24, 44, and 56) are capable of being lithographically defined in a small surface area and therefore minimize the surface area consumed by the redundant circuits regions (14a-14i). The redundant circuits (16k-16n) are preferably used by focused ion beam (FIB) equipment to replace, repair, or supplement various electrically functional portions of the circuit modules (12a-12f).

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