Circuit identifier for use with focused ion beam equipment

Details Circuit identifier for use with focused ion beam equipment Circuit identifier for use with focused ion beam equipment

1992-04-20

1995-04-18

Prenty, Mark V.

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

257798, 257 48, H01L 2702

Patent

active

054081319

ABSTRACT:
A circuit die (10) has circuit modules (12a-12f). Adjacent the circuit modules (12a-12f) is a plurality of redundant circuits regions (14a-14i). Each of the redundant circuit regions (14a-14i) has one or more redundant circuits, such as redundant circuits (16k-16n). The redundant circuits (16k-16n) are identified and oriented via one of a binary, a ternary, or a quaternary circuit identifier comprised of symbols, such as symbols (18, 24, 44, and 56). The symbols (18, 24, 44, and 56) are capable of being lithographically defined in a small surface area and therefore minimize the surface area consumed by the redundant circuits regions (14a-14i). The redundant circuits (16k-16n) are preferably used by focused ion beam (FIB) equipment to replace, repair, or supplement various electrically functional portions of the circuit modules (12a-12f).

REFERENCES:
patent: 4343877 (1982-08-01), Chiang

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