Circuit for capacitive sensor made of brittle material

Details Circuit for capacitive sensor made of brittle material Circuit for capacitive sensor made of brittle material

1984-10-12

1986-04-29

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

34087037, H01G 700, G08C 1910

Patent

active

045861080

ABSTRACT:
Sensor circuitry for sensing changes in capacitance of separate sensor portions wherein in each of the sensor portions a separate plate will deflect in response to changes in parameter, for example changes in pressure, to thereby provide an output that relates to differential pressure. The specific example is in connection with sensor portions which are fluid filled and in fluid communication with each other so that a deflection of a plate on one of the sensor portions causes an opposite deflection of a plate on the other sensor portion. The circuitry provides a stable output regardless of some variation in sensor characteristics. Temperature induced variations in the dielectric constant and density of the fluid filling the sensor portions may all be compensated for in the circuitry. Preferably CMOS logic devices that provide a signal which exhibits a direct relationship to capacitive loading are used. The signal is sensed to modify the voltage applied to the CMOS device to achieve a desired relationship. The voltage or current output from the capacitors indicates the capacitive values of the sensor.

REFERENCES:
patent: 4398194 (1983-08-01), Johnston
Behr, M. and J. Giachino, A Miniature Pressure Sensor for Automotive Applications, I Mech E. Conference Publications 1981-10 (1981), presented at The Third International Conference on Automotive Electronics at London in 10/1981.
MKS Instruments, Inc., Instruction Manual for MKS Baratron.RTM. Type 22A Pressure Gauge, Apr. 1979, pp. 3-1 to 3-3.

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