Circuit configuration for the automatic tuning of a matching net

Details Circuit configuration for the automatic tuning of a matching net Circuit configuration for the automatic tuning of a matching net

1989-09-28

1991-10-01

Gensler, Paul

Wave transmission lines and networks

Automatically controlled systems

Impedance matching

333 33, H03H 1130

Patent

active

050537253

ABSTRACT:
The invention relates to a circuit configuration for the automatic tuning of a matching network (2) disposed between an electrical energy source (1) and a load (3). Herein two measured signals (U.sub.E, U.sub.1) are received from which are formed the magnitudes of three signals (U.sub.E, U.sub.1, I.sub.E) from which, in turn, the control values x.sub.1, x.sub.2 are determined for the setting of the matching network (2).

REFERENCES:
patent: 3743974 (1973-07-01), Sheffield
patent: 3919644 (1975-11-01), Smolka
patent: 4112395 (1978-09-01), Seward
patent: 4207137 (1980-06-01), Tretola
patent: 4679007 (1987-07-01), Reese et al.
Solid State Technology, Apr. 1983, p. 79, "Dual Reactor In-Line Plasma System".
Solid State Science, May 1967, pp. 505-508, "Deposition of Tantalum and Tantalum Oxide by Superimposed RF and D-C Sputtering".

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