Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Reexamination Certificate
2006-03-07
2006-03-07
Hassanzadeh, Parviz (Department: 1763)
Etching a substrate: processes
Forming or treating electrical conductor article
Forming or treating of groove or through hole
C216S013000, C029S847000
Reexamination Certificate
active
07008549
ABSTRACT:
Composite member2consisting of ceramic insulator substrate3and two metal layers4A and4B such as aluminum sheets is subjected to milling in order to remove the unwanted areas of metal layer4A (where inter-element spacings are to be formed). In order to suppress cracking due to substrate warpage, a small bottom portion of4A is left intact as residual metal layer4Aa which is preferably removed by etching. Milling is performed after thin-film layer of etching resist5is applied to the surface of metal layer4A. By milling in two stages, a step is formed at the bottom of lateral sides of a pattern element to make a skirt which contributes to reducing external stresses.
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Hara Masahiro
Osanai Hideyo
Culbert Roberts
Dowa Mining Co. Ltd.
Frishauf Holtz Goodman & Chick P.C.
Hassanzadeh Parviz
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