Chucking system for nano-manufacturing

Details Chucking system for nano-manufacturing Chucking system for nano-manufacturing

2010-09-16

2011-10-11

Gupta, Yogendra (Department: 1744)

Plastic article or earthenware shaping or treating: apparatus

Preform reshaping or resizing means: or vulcanizing means...

Surface deformation means only

C355S076000, C425S193000, C425S397000

Reexamination Certificate

active

08033815

ABSTRACT:
Chucking mechanisms may include a plurality of chucking sections respectively connecting to a pressure control device to generate individual chucking forces. The individual chucking forces of the chucking sections may be varied by the pressure control device such that a magnitude of separation force is reduced for an imprint lithography system.

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