Chucking system for modulating shapes of substrates

Details Chucking system for modulating shapes of substrates Chucking system for modulating shapes of substrates

2006-01-03

2006-01-03

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000

Reexamination Certificate

active

06982783

ABSTRACT:
The present invention is directed to a chucking system to modulate substrates so as to properly shape and position the same with respect to a wafer upon which a pattern is to be formed with the substrate.

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