Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only
Reexamination Certificate
2009-11-11
2011-10-11
Ewald, Maria Veronica (Department: 1744)
Plastic article or earthenware shaping or treating: apparatus
Preform reshaping or resizing means: or vulcanizing means...
Surface deformation means only
C425S405100, C425S388000, C355S076000
Reexamination Certificate
active
08033813
ABSTRACT:
The present invention is directed towards a chucking system to hold a substrate, said system including, inter alia, a chuck body having first and second opposed sides, said first side including an array of fluid chambers arranged in rows and columns, said fluid chambers each comprising first and second spaced-apart recesses defining first and second spaced-apart support regions, with said first support region cincturing said second support region and said first and second recesses, and said second support region cincturing said second recess, with said substrate resting against said first and second support regions, with said first recess and a portion of said substrate in superimposition therewith defining a first chamber and said second recess and a portion of said substrate in superimposition therewith defining a second chamber, with each column of said first chambers and each row of said second chambers being in fluid communication with a differing source of fluid to control a flow of fluid in said array of fluid chambers.
REFERENCES:
patent: 5534073 (1996-07-01), Kinoshita et al.
patent: 6809802 (2004-10-01), Tsukamoto et al.
patent: 2000/195927 (2000-07-01), None
patent: WO/2004/044651 (2004-05-01), None
Cherala Anshuman
Choi Byung-Jin
Lad Pankaj B.
Shackleton Steven C.
Ewald Maria Veronica
King Cameron A.
Molecular Imprints, Inc.
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