Chuck transport method and system

Details Chuck transport method and system Chuck transport method and system

2006-06-27

2006-06-27

Lillis, Eileen D. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S149000, C414S222010, C414S222130, C414S223010, C414S804000, C414S805000, C414S939000

Reexamination Certificate

active

07066703

ABSTRACT:
A method and system for transporting a plurality of substrates between a transfer chamber and at least one processing chamber. The system includes a chuck assembly with a plurality of chucks configured to receive wafer substrates, where the chuck assembly is movably configured to provide for transfer of the plurality of substrates between a transfer chamber and a processing chamber. The system provides a structure that allows for the processing of one substrate on a first chuck, while a second substrate is loaded onto a second chuck and prepared for processing.

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patent: 197 42 923 (1999-04-01), None
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