Chucks or sockets – Pivoted jaw
Reexamination Certificate
2005-11-15
2005-11-15
Banks, Derris H. (Department: 3722)
Chucks or sockets
Pivoted jaw
C279S035000
Reexamination Certificate
active
06964419
ABSTRACT:
A design for chuck rollers and a design for chuck pins for a wafer cleaning and drying system is disclosed. Each of the chuck rollers includes a roller head which ensures proper engagement of a wafer with the chuck rollers for rotation of the wafer during a wafer scrubbing process. Each of the chuck pins is provided with an extending flange or salient to prevent upward movement of and disengagement of the wafer from the chuck pins as the wafer is rotated during a wafer scrubbing and drying process. Each chuck pin may also present a wafer support surface of enhanced surface area for supporting the wafer on the chuck pin.
REFERENCES:
patent: 2723861 (1955-11-01), Eisler
patent: 2991084 (1961-07-01), Garrison
patent: 3175820 (1965-03-01), Schiler
patent: 3964957 (1976-06-01), Walsh
patent: 5421056 (1995-06-01), Tateyama et al.
patent: 5431421 (1995-07-01), Thompson et al.
patent: 6405739 (2002-06-01), Liu
patent: 6578853 (2003-06-01), Treur et al.
patent: 74542 (1983-03-01), None
patent: 2000114332 (2000-04-01), None
patent: 2001156030 (2001-06-01), None
patent: 2002254317 (2002-09-01), None
Banks Derris H.
Taiwan Seminconductor Manufacturing Co., Ltd.
Talbot Michael W.
Tung & Associates
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