Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1976-10-07
1978-08-01
Rolinec, Rudolph V.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
29416, 29624, 324158P, 339117P, G01R 3102, G01R 3122, H01B 1300
Patent
active
041045890
ABSTRACT:
A chuck for use in the testing of semiconductor wafers comprising first and second pluralities of electrically conductive members alternately arranged to provide a wafer receiving surface. The members are substantially completely electrically isolated from each other. Electric power leads and measurement sensing leads are provided to the first plurality of conductive members and the second plurality of conductive members respectively.
REFERENCES:
patent: 3333274 (1967-07-01), Forcier
patent: 3543214 (1970-11-01), Johnston
patent: 3611128 (1971-10-01), Nagata
patent: 3665509 (1972-05-01), Elkins
Baker Robert Lee
Mahoski Calvin Michael
Partilla John David
Ronan, Jr. Harold Robert
Christoffersen H.
Hays R. A.
Karlsen Ernest F.
RCA Corporation
Rolinec Rudolph V.
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