Chuck for use in testing of semiconductor pellets

Details Chuck for use in testing of semiconductor pellets Chuck for use in testing of semiconductor pellets

1979-10-02

1982-04-27

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158P, G01R 106

Patent

active

043273254

ABSTRACT:
A chuck for use in the testing of semiconductor pellets comprising first and second electrically conductive members alternately arranged to provide a wafer receiving surface. The members are substantially completely electrically isolated from each other. An electric power lead and a measurement sensing lead are provided to the first and second conductive members, respectively.

REFERENCES:
patent: 4104589 (1978-08-01), Baker et al.

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