Chuck for transporting a wafer carrier

Details Chuck for transporting a wafer carrier Chuck for transporting a wafer carrier

1988-10-12

1990-06-26

Werner, Frank E.

Material or article handling

Elevator or hoist and loading or unloading means therefor

Grab

414787, 414736, 294 871, 294902, 294 88, 294 8726, 901 37, 901 31, B65G 6900

Patent

active

049367340

ABSTRACT:
A chuck for transporting wafer carriers is designed to hold the wafer carriers in a cantilever manner and with support members supporting one sides of the wafer carriers. This enables the whole chuck to be extremely compact. This also enables the wafer carriers to be made freer fron any limit while they are being transported and prevents them from being damaged because they can be steadily transported.

REFERENCES:
patent: 1909813 (1933-05-01), Crosbie
patent: 3184088 (1965-05-01), Berge
patent: 3992049 (1976-11-01), Milholen et al.
patent: 4184799 (1980-01-01), Arndt
patent: 4228902 (1980-10-01), Schulte

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